반도체 공정 온도 제어 장치
Photo 공정 온도 제어 장치 BCM (Bake Control Module)
| Company (model) | Optimized for bake controller | |
|---|---|---|
| Communication | Protocol | EtherCAT, RS485 |
| No. of connections | 255, 31 | |
| Speed [max.] | 100Mbps / 38.4kbps | |
| Controller | Method | PID, Anti-windup, Programmable |
| No. of channels | 15 | |
| Range | 0 ~ 1200℃ | |
| Digital I/O | No. of input | 75 |
| No. of output | 50 | |
| Temperature conversion |
Type | PT100, Thermocouple K |
| No. of channels | 15 | |
| Sampling rate | 60 sample/sec | |
| Resolution | 0.001℃ | |
| Heater output | No. of channels | 15ch. with fuses |
| Rated current | 3A | |
| Rated voltage | 208VAC 60Hz | |
| Current sensor | Type | High Accuracy current sensor IC |
| No. of channels | 15 | |